As manufacturing technologies are scaled down from macro to micro level, unexpec-ted process behavior emerges, so called size effects. This also regards reliable optical quality inspection, as tolerances in micrometer range require microscopic solutions. Optical magnification comes with a strong reduction in field of depth as well as a decrease in the measured area, which makes exact positioning and possibly measurements at different depth levels necessary. Here we present and evaluate a demonstrator platform for the automatic measurement of micro parts using a light field camera.
