Analysis systems for petrochemistry and gas analysis, process control and surveillance of environment as well as in biotechnology and medicine systems are promising fields of application for micro and nano technologies. Such micro analysis systems combine low cost of investment, installation and use with precise and fast measurements at low consumption of probe and energy. For a successful introduction of such systems, however, these technologies have to be incorporated throughout the complete system, otherwise the advantages of high integration density, low cost of fabrication at high functionality will not be obtained. Various such micro analysis systems are presented e.g. a gas chromatograph, a mass spectrometer and an infrared measurement system.
