The continuous attempt to miniaturize components and structures demands increasing improvements in the field of micromachining technologies. A big challenge for the production technology is to manufacture microsystems and micro parts made of different materials. Processes well suited for three-dimensional machining of many materials are mechanical production technologies. A practicable production technology that is able to structure hard and brittle materials with high surface qualities is micro-grinding. The following article should give an overview about the current state of the technology of micro grinding of hardened steels.