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Integration of Semiconductor Manufacturing Systems in SAP Netweaver | 
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| Journal | Industrie Management |
| Issue | Volume 24, 2008, Edition 2, Pages 39-42 |
| Share | Cite | Download |
Abstract
For the efficient controlling of the equipments in the semiconductor manufacturing more and more ERP systems are used. Therefore, the state of the art including possible future developments is discussed first. As a conclusion the use of the SAP NetWeaver platform is suggested for the control of semiconductor manufacturing automat. Its evaluation as well as the production of a prototype are described.
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