The development of novel micro parts for several applications has grown rapidly over the last years. In most cases, it is possible to manufacture micro parts by means of micro machining. However, mechanical material removal processes make use of large-scale machine tools with dimensions that exceed the small-sized parts (usually up to 10 mm) by a factor of more than 1,000. This paper shows advances in the combination of micro and ultra-precision machining processes in order to meet the strict micro parts’ requirements and a novel concept for a micro grinding module, which can be integrated into small-scaled machine tools.
