Exact planning and configuration of process chains contributes significantly to manufacturing excellence in micro manufacturing. In this type of manufacturing, production must adhere to very low tolerances. Furthermore, a multitude of manufacturing processes is available in micro manufacturing whereas some processes are better suited than others for given tasks. The methodology “Micro Process Planning and Analysis” (µ-ProPlAn), which is described in this article, provides suitable means for planning and configuration of such process chains with the necessary level of detail. To reduce the manual workload in comparing alternative process chains, this article proposes an extension, which enables an automatic selection of alternative processes based on a geometry oriented annotation of the µ-ProPlAn process models.