Quality and speed in manufacturing and assembly of micro systems significantly increased within the last years. Sophisticated micro- and nano-rapid prototyping methods in connection with replication techniques allow mass production of micro parts with very high precision. For quality control of those parts an as well fast as precise measuring method is necessary. The very good experiences of macroscopic fringe projection shall therefore be adapted and optimized to micro systems. Endoscopic fringe projection can achieve the measurement of small volumes optically, 3 dimensionally and precisely. The measuring principle and chances of this technique are explained exemplary on a fibrebased endoscopic fringe projection system, which currently is developed in cooperation with the SFB/TR 73 which is supported by the German research foundation (DFG).
