Complex production systems in micro production, concerning the manufacturing of miniaturised systems, assemblies and components, are very special. For example Hesselbach [1] stated, that micro production technology (sometimes to be found as (ultra) precision engineering) spans basically all, partly highly specialised production techniques. Kiesewetter [2] points out, that micro production is not just a kind of “shrinked machine building or mechanical engineering”. Mostly the whole manufacturing process chain or at least larger, interrelated section or subsystems and -processes, for example mainly for the manufacturing of miniaturised mechanical modules or assemblies respectively, are basically not examined. The paper discusses and presents topics concerning the planning and operations of micro production manufacturing process chains, against the background of the manufacturing of miniaturised mechanical modules and components.