micro machining

The development of novel micro parts for several applications has grown rapidly over the last years. In most cases, it is possible to manufacture micro parts by means of micro machining. However, mechanical material removal processes make use of large-scale machine tools with dimensions that exceed the small-sized parts (usually up to 10 mm) by a factor of more than 1,000. This paper shows advances in the combination of micro and ultra-precision machining processes in order to meet the strict micro parts’ requirements and a novel concept for a micro grinding module, which can be integrated into small-scaled machine tools.

The continuous attempt to miniaturize components and structures demands increasing improvements in the field of micromachining technologies. A big challenge for the production technology is to manufacture microsystems and micro parts made of different materials. Processes well suited for three-dimensional machining of many materials are mechanical production technologies. A practicable production technology that is able to structure hard and brittle materials with high surface qualities is micro-grinding. The following article should give an overview about the current state of the technology of micro grinding of hardened steels.