Already today intelligent functions based on microsystems technologies can be found in many applications of everybody’s daily life. Mobile phones are called smart phones. They are equipped with digital cameras, music players, game consoles and PDA’s. Cars are getting more and more intelligent due to self controlled operation and adaptive safety systems. Japan, USA and Europe belong to the first research and de-velopment sites worldwide. Key factors for successful products will be system integration, miniaturisation and last but not least transdisciplinary technology approaches. Thereby the gap has to be bridged between the nanometer and micrometer scale of the components and the customer’s macro world. Smart Systems technologies and their integration will therefore have a significant impact on the competitiveness of entire sectors as aeronautics, automotives, security, logistics, medical technology and process engineering.