MEMS

Quality and speed in manufacturing and assembly of micro systems significantly increased within the last years. Sophisticated micro- and nano-rapid prototyping methods in connection with replication techniques allow mass production of micro parts with very high precision. For quality control of those parts an as well fast as precise measuring method is necessary. The very good experiences of macroscopic fringe projection shall therefore be adapted and optimized to micro systems. Endoscopic fringe projection can achieve the measurement of small volumes optically, 3 dimensionally and precisely. The measuring principle and chances of this technique are explained exemplary on a fibrebased endoscopic fringe projection system, which currently is developed in cooperation with the SFB/TR 73 which is supported by the German research foundation (DFG).

Already today intelligent functions based on microsystems technologies can be found in many applications of everybody’s daily life. Mobile phones are called smart phones. They are equipped with digital cameras, music players, game consoles and PDA’s. Cars are getting more and more intelligent due to self controlled operation and adaptive safety systems. Japan, USA and Europe belong to the first research and de-velopment sites worldwide. Key factors for successful products will be system integration, miniaturisation and last but not least transdisciplinary technology approaches. Thereby the gap has to be bridged between the nanometer and micrometer scale of the components and the customer’s macro world. Smart Systems technologies and their integration will therefore have a significant impact on the competitiveness of entire sectors as aeronautics, automotives, security, logistics, medical technology and process engineering.

While the number of custom specific products is increasing the order size often diminishes. This problem leads to difficulties in managing demand changes, promising accurate dates and ensuring optimal equipment utilisation. A real-time information gap exists in the heart of most manufacturing enterprises, since there is a lack of visibility & predictability. Based on modern MES with maximum equipment integration, the use of automatic process control and optimization enables SME to be more competitive, efficient and customer-friendly.