The ultra-precise surface structuring by means of single crystal diamond tools can be applied for the flexible machining of optical components used in display or reflector-technologies, for light guiding elements or even for high precision mechanical or fluidical applications. By means of a sophisticated tuning of the machine, the tool and the process itself, an extreme precision in the sub-micron range, which is requested on behave of the applications, can be achieved on work pieces with a size of one square meter and more.