The increasing demand of hybrid micro-technical systems resp. products in small to middle size lots, requires on the one hand new concepts from the micro production engineering and the production process planning and on the other hand methods for the development of micro production systems. Taking the postulation „small machines for small components“ into account, Micro Factories consist of highly specialized mini machines, each having a footprint of about 0,09 m² in comparison to 5 m² of conventional systems [1]. Micro Factories are arranged independently for each task to form a complex production system. Viewing the use of mini machines in micro production from the perspective of the production process, a concept for using adaptive, automatic quality control loops is proposed.