Fast ions produced in so-called broad beam ion sources are established as highly deterministic tools in ultra-precision surface finishing processing. The driving force for this kind of technology is the requirement for highest quality surfaces with ultimate roughness and accuracy in topology. High performance optics which need such surfaces with fabrication tolerances below one nanometer are used for lithography, laser, x-ray or optical satellite communication as well as highly integrated electronics for processors and memory circuits and surface acoustic wave filters. New physical effects of ion beam induced smoothing of surface and nanostructure give rise for new research and development with a high potential of technology exploitation. Scientists and technicians from the Leibniz Institute for Surface Modification do intensive research work in this field and develop ion beam technologies and components mature for application in industry.
